MeSH Browser

MeSH Heading: Microtechnology
Tree Number(s): H01.570; J01.897.520.500
Unique ID: D055616
RDF Unique Identifier: http://id.nlm.nih.gov/mesh/D055616
Scope Note: Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.
Entry Term(s): Microfabrication; Micromachining; Micromanufacturing
NLM Classification #: QT 36.5
Public MeSH Note: 2009
History Note: 2009
Date Established: 2009/01/01
Date of Entry: 2008/07/08
Revision Date: 2008/10/16

Allowable Qualifiers: instrumentation (IS)

methods (MT)

standards (ST)

statistics & numerical data (SN)

Concept UI: M0518878
Scope Note: Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.
Terms: Microtechnology Preferred Term
Term UI T715325
Date02/28/2008
LexicalTag NON
ThesaurusID NLM (2009); Microfabrication
Term UI T715326
Date02/28/2008
LexicalTag NON
ThesaurusID NLM (2009); Micromachining
Term UI T715328
Date02/28/2008
LexicalTag NON
ThesaurusID NLM (2009); Micromanufacturing
Term UI T715327
Date02/28/2008
LexicalTag NON
ThesaurusID NLM (2009)

Microtechnology MeSH Descriptor Data 2025