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Electron Probe Microanalysis MeSH Descriptor Data 2026
Identification and measurement of ELEMENTS and their location based on the fact that X-RAYS emitted by an element excited by an electron beam have a wavelength characteristic of that element and an intensity related to its concentration. It is performed with an electron microscope fitted with an x-ray spectrometer, in scanning or transmission mode.
Entry Version
ELECTRON PROBE MICROANAL
Entry Term(s)
Microanalysis, Electron Probe
Microscopy, Electron, X-Ray Microanalysis
Spectrometry, X Ray Emission, Electron Microscopic
Spectrometry, X Ray Emission, Electron Probe
Spectrometry, X-Ray Emission, Electron Microscopic
Identification and measurement of ELEMENTS and their location based on the fact that X-RAYS emitted by an element excited by an electron beam have a wavelength characteristic of that element and an intensity related to its concentration. It is performed with an electron microscope fitted with an x-ray spectrometer, in scanning or transmission mode.